ESS4810 Micro System Fabrication and Experiment, 微系統製造與實驗

Course Description：

Understanding the fundamental micro fabrication technology for MicroElectroMechanical Systems (MEMS).  There will be five basic MEMS fabrication techniques taught, including wafer cleaning and thermal oxidation, microlithography and wet/dry etching, e-beam evaporation, bulk and surface micromachining, and micro electro-plating.  Students will be broken into 4 groups and finish all five labs besides lectures.

課程說明：

本課程的教學目標在幫助學生暸解微機電系統在製作上所運用的各種微製造程序及其原理，除了課堂講解之外，並分四組於學期中進行包含矽晶圓清潔與氧化、微影與蝕刻、電子束蒸鍍、體型與面型微加工、與微電鍍等五項製程實驗。