Micro-Electro-Mechanical System
- Nano-/Micro- Bio-Opto-Electro-Mechanical Systems and Fluidics Laboratory
- Nano/Micro System Integration Laboratory
- Vacuum and Thin Film Laboratory
- Electronic Instrument System Laboratory
- Semiconductor Device Processing & Measuring Laboratory
- Data Analysis and Interpretation Laboratory
- Micro System Fabrication Laboratory
- Nuclear Instrument Laboratory
- Green and Sustainable Electronics Laboratory
- Finite Element Analysis Laboratory
- Micro System Heat Flow Laboratory